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searching for Deep reactive-ion etching 8 found (28 total)

alternate case: deep reactive-ion etching

Black silicon (3,017 words) [view diff] no match in snippet view article find links to article

Formation of Silicon nanopores and Nanopillars by a Maskless Deep Reactive Ion Etching Process [permanent dead link], 11 November 2008 Zhiyong Xiao;

Eduard Rhein Foundation (890 words) [view diff] no match in snippet view article find links to article

Award: Dr. Franz Laermer and Andrea Urban for the invention of the deep reactive ion etching process (Bosch Process), a key process for manufacturing semiconductor

Elmos Semiconductor (312 words) [view diff] no match in snippet view article find links to article

inch wafers and has advanced technical capabilities including deep reactive ion etching (DRIE) and plasma enhanced fusion bonding.[clarification needed]

Open microfluidics (4,376 words) [view diff] exact match in snippet view article find links to article

channels are given hydrophilic treatment using oxygen plasma or deep reactive-ion etching(DRIE). V-groove, unlike U-groove, allows for a variety of velocities

Niels Quack (1,380 words) [view diff] no match in snippet view article find links to article

"Precision micro-mechanical components in single crystal diamond by deep reactive ion etching". Microsystems & Nanoengineering. 4 (1): 12. Bibcode:2018MicNa

Frédérique Constant (1,619 words) [view diff] exact match in snippet view article find links to article

create better, more precise and more reliable mechanical watches. Deep reactive-ion etching is used to shape silicon wafers into escapement wheels, pallets

Adhesive bonding of semiconductor wafers (3,833 words) [view diff] no match in snippet view article find links to article

UV light exposure is applied but can also be achieved through deep reactive-ion-etching (DRIE). During coating and structuring of the SU-8 the tempering

Bio-MEMS (9,646 words) [view diff] no match in snippet view article find links to article

Conventional micromachining techniques such as wet etching, dry etching, deep reactive ion etching, sputtering, anodic bonding, and fusion bonding have been used