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searching for Heat flux sensor 2 found (15 total)

Lev Bulat (849 words) [view diff] case mismatch in snippet view article find links to article

1484215. Priority from 12.01.87. USSR. Bulat L.P. and Gutsal D.D. The Heat Flux Sensor // Patent # SU 1545103. Priority from 10.11.87. Published 23.02.90

Costas Spanos (558 words) [view diff] exact match in snippet view article find links to article

Freed, M. V. P. Kruger, C. J. Spanos, and K. Poolla, "Wafer-grown heat flux sensor arrays for plasma etch processes," IEEE Trans. Semiconductor Manufacturing