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searching for Microlithography 41 found (59 total)

Exposure latitude (499 words) [view diff] exact match in snippet view article find links to article

digital and analogue processes, e.g. optical microlithography or photography. In the case of optical microlithography this value statistically describes the

Chris Mack (scientist) (312 words) [view diff] exact match in snippet view article

Chris Mack Roast at the SPIE Microlithography conference. In 2009, Mack was awarded the Frits Zernike Award for Microlithography at the SPIE Advanced Lithography

Photomask (2,195 words) [view diff] exact match in snippet view article find links to article

phase-shifting masks". In Wiley, James N. (ed.). 10th Annual Symp on Microlithography. Vol. 1496. pp. 27–53. doi:10.1117/12.29750. S2CID 109009678. Eom,

Resolution enhancement technology (189 words) [view diff] exact match in snippet view article find links to article

extensions for the future". Proc. SPIE 5377, Optical Microlithography XVII. Optical Microlithography XVII. 5377: 1. Bibcode:2004SPIE.5377....1S. doi:10

GDSII (770 words) [view diff] exact match in snippet view article find links to article

Calma, February 1987 SPIE Handbook of Microlithography, Micromachining and Microfabrication, Vol. 1: Microlithography // Bellingham, Wash. : SPIE Optical

Electron-beam lithography (4,735 words) [view diff] exact match in snippet view article find links to article

Rooks, M.J. (2000). "2. Electron beam lithography". Microlithography. SPIE Handbook of Microlithography, Micromachining and Microfabrication. Vol. 1. Archived

Carl Zeiss SMT (606 words) [view diff] exact match in snippet view article find links to article

Prosenjit (Ed.) (1997). Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography. SPIE Press. p. 83. Benschop, Jos;

Micralign (3,761 words) [view diff] exact match in snippet view article find links to article

through the second half of the 1970s and early 1980s. Formed into the Microlithography Division, by 1980 its income was the largest of Perkin-Elmer's divisions

Phase-shift mask (805 words) [view diff] exact match in snippet view article find links to article

Rai-Choudhury, P., editor (1997). Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography. Bellingham, Washington: SPIE Optical

Stigmator (825 words) [view diff] exact match in snippet view article find links to article

Rai-Choudhury (January 1997). Handbook of Microlithography, Micromachining, and Microfabrication: Microlithography. IET. p. 154. ISBN 978-0-85296-906-9. Peter

Clifford Paterson Lecture (682 words) [view diff] exact match in snippet view article find links to article

At home with science and technology 1988 Walter Thompson Welford on Microlithography and the ultraviolet: experiments with an excimer laser 1989 Alan Walter

Multiple patterning (7,206 words) [view diff] exact match in snippet view article find links to article

self alignment double patterning (SADP)". Optical Microlithography XXI. 6924. Optical Microlithography XXI; 69244E: 69244E. Bibcode:2008SPIE.6924E..4EB

Rotating ring-disk electrode (1,063 words) [view diff] exact match in snippet view article find links to article

0.1 and 0.5 millimeters, and narrower gaps have been created using microlithography techniques. Another important parameter for an RRDE is the "collection

MEMS (5,625 words) [view diff] exact match in snippet view article find links to article

In Choudhury PR (ed.). Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography. Vol. 1. London: SPIE. doi:10.1117/3

Peter Trefonas (1,627 words) [view diff] exact match in snippet view article find links to article

Engineering in 2018 for the "invention of photoresist materials and microlithography methods underpinning multiple generations of microelectronics". DuPont

Titanium nitride (1,849 words) [view diff] exact match in snippet view article find links to article

Proceedings of SPIE. Metrology, Inspection, and Process Control for Microlithography XXII. 6922 (2): 69220V. Bibcode:2008SPIE.6922E..0VD. doi:10.1117/12

Walter Thompson Welford (1,379 words) [view diff] exact match in snippet view article find links to article

elected to the Royal Society in 1980. He also won awards for his work in Microlithography and the ultraviolet: experiments with an excimer laser. Patents He

Kevin Rolland Thompson (506 words) [view diff] exact match in snippet view article find links to article

at Perkin-Elmer Corporation for 10 years as an optical designer in microlithography applications and advanced systems for ground- and space-based remote

SPIE (1,295 words) [view diff] exact match in snippet view article find links to article

Early Career Achievement Awards (since 2008) Frits Zernike Award for Microlithography (since 2004) G.G. Stokes Award in Optical Polarization (since 2004)

14 nm process (2,618 words) [view diff] exact match in snippet view article find links to article

to 16-nm product design and patterning flows". Proc. SPIE. Optical Microlithography XXIII. 7640: 76400S. Bibcode:2010SPIE.7640E..0SN. doi:10.1117/12.848194

Ultratech (1,087 words) [view diff] exact match in snippet view article find links to article

located in Santa Clara, California. The product line consisted of 1x microlithography steppers, using a unique catadioptric lens design. Until 1992, Ultratech

Corning Inc. (2,788 words) [view diff] exact match in snippet view article find links to article

Corning Incorporated manufactures a high-purity fused silica employed in microlithography systems, a low expansion glass utilized in the construction of reflective

3ω-method (535 words) [view diff] exact match in snippet view article find links to article

steady-state techniques. Although some expertise in thin film patterning and microlithography is required, this technique is considered as the best pseudo-contact

Contact lithography (1,938 words) [view diff] exact match in snippet view article find links to article

(as the oxide surface is not a metal). Su, Frederic (1997-02-01). "Microlithography: from contact printing to projection systems". SPIE Newsroom. SPIE-Intl

Alan David White (717 words) [view diff] exact match in snippet view article find links to article

also made significant contributions to the development of lenses for microlithography, as well as methods for aligning a lithographic mask using special

Low-temperature polycrystalline silicon (1,501 words) [view diff] exact match in snippet view article find links to article

element to control the image resolution. Enhancing the performance and microlithography for TFTs is important for advancing LTPS active-matrix OLEDs. These

Dense plasma focus (4,603 words) [view diff] exact match in snippet view article find links to article

diagnostics (soft x-rays, neutrons, electron and ion beams), applications (microlithography, micromachining, materials modification and fabrication, imaging &

Length measurement (3,394 words) [view diff] exact match in snippet view article find links to article

Proceedings of SPIE. Metrology, Inspection, and Process Control for Microlithography XXI. 6518: 651810. Bibcode:2007SPIE.6518E..10O. doi:10.1117/12.713368

Anti-reflective coating (4,057 words) [view diff] exact match in snippet view article find links to article

Silver, Richard M (ed.). Metrology, Inspection, and Process Control for Microlithography XVIII. Vol. 5375. SPIE. pp. 940–948. Bibcode:2004SPIE.5375..940Y. doi:10

Telecentric lens (1,261 words) [view diff] exact match in snippet view article find links to article

Lithographic Lens: its history and evolution" (PDF). Proc. SPIE. Optical Microlithography XIX. 6154: 615403. Bibcode:2006SPIE.6154...24M. doi:10.1117/12.656163

Deoxycholic acid (3,031 words) [view diff] exact match in snippet view article find links to article

incorporation in nanotechnology. They also have found application in microlithography as photoresistant components. In the United States, deoxycholic acid

Lean manufacturing (7,462 words) [view diff] exact match in snippet view article find links to article

Continuous flow manufacturing. Proc. SPIE1496, 10th Annual Symposium on Microlithography. (March 1, 1991), 239–246. Roebuck, Kevin. 2011. Business Process Modeling:

Semiconductor device fabrication (10,972 words) [view diff] exact match in snippet view article find links to article

Visiting GlobalFoundries". PCMag Asia. Retrieved November 23, 2023. Microlithography: Science and Technology, Second Edition. CRC Press. 3 October 2018

Two-photon absorption (4,647 words) [view diff] exact match in snippet view article find links to article

"Two-photon lithography for microelectronic application". Optical/Laser Microlithography V. 1674. SPIE: 776–782. Bibcode:1992SPIE.1674..776W. doi:10.1117/12

Extreme ultraviolet lithography (15,597 words) [view diff] exact match in snippet view article find links to article

extreme-ultraviolet lithography. 23. SPIE annual international symposium on microlithography conference, Santa Clara, CA (United States), 22-27 Feb 1998. OSTI 310916

Thermal conductivity measurement (4,102 words) [view diff] exact match in snippet view article find links to article

steady-state techniques. Although some expertise in thin film patterning and microlithography is required, this technique is considered as the best pseudo-contact

Samuel Kounaves (1,954 words) [view diff] exact match in snippet view article find links to article

1021/ac00217a004. "Iridium-Based Ultramicroelectrode Array Fabricated by Microlithography" (PDF). "On-Site Analysis of Arsenic in Groundwater Using a Microfabricated

David A. Hammer (1,826 words) [view diff] exact match in snippet view article find links to article

; Kalantar, Daniel H. & Qi, Nian-Sheng, "Method and apparatus for microlithography using x-pinch x-ray source", issued 1992-04-07 "Exploding wires open

Probe tip (8,217 words) [view diff] exact match in snippet view article find links to article

Inspection, and Process Control for Microlithography XIII. Metrology, Inspection, and Process Control for Microlithography XIII. Vol. 3677. p. 20. doi:10.1117/12

List of fellows of IEEE Electron Devices Society (69 words) [view diff] exact match in snippet view article find links to article

1994 Martin Peckerar For contributions to and leadership in X-ray and microlithography 1994 James Spratt For contributions to the design and fabrication of

List of fellows of IEEE Solid-State Circuits Society (73 words) [view diff] exact match in snippet view article find links to article

1994 Martin Peckerar for contributions to and leadership in X-ray and microlithography 1994 Tsutomu Sasao for contributions to the design theory and techniques