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searching for Next-generation lithography 2 found (12 total)

alternate case: next-generation lithography

Electron-beam lithography (4,735 words) [view diff] case mismatch in snippet view article find links to article

"EBM-5000: electron-beam mask writer for 45-nm node". Photomask and Next-Generation Lithography Mask Technology XIII. SPIE Proceedings. Vol. 6283. p. 628306

Extreme ultraviolet lithography (15,597 words) [view diff] case mismatch in snippet view article find links to article

(ed.). Photomask Japan 2018: XXV Symposium on Photomask and Next-Generation Lithography Mask Technology. p. 8. doi:10.1117/12.2324670. ISBN 978-1-5106-2201-2